Chemshun Alumina Wafer Polishing Plate/Turn Table is high purity 99.7-99.9%Alumina Ceramic.It's shaped by PIBM. It is one of the semiconductor industry 

because of its incomparable thermal and dimensional stability,and the resistance to the sever microchip-processing equipment environment. 

Application:

As an important component of CMP chemical mechanical polishing process. CMP is the necessary for producing process of the sapphire and Wafer.

Chemshun Ceramics' alumina ceramics sapphire lapping wafer polishing is shaped as PIBM producing process. Its an internaltional  advanced technology.  PIBM sucessful solve the key problem of crack and deformation of large size alumina ceramics.PIBM technology will open another window of fine ceramics. We not only produce the high quality alumina ceramic wafer polishing plate, but also other series of large size high purity alumina ceramics such as 1200x500x20mm ceramic substrates for LCD manufacturing equipment, semiconductor delviery tracks, vacuum parts, general mechanical parts, bulletproof ceramics. 

Features :  

High rigidity (Hardness, Mechanical Strength, Wear Resistance)

High chemical durability

Incomparable thermal

High purity and uniformity

Surface shape & roughness control

Pretty Price

 Size:

Disc, ring size below ∅850mm, thickness 45mm.

For example: D150mm, D360mm,D 600mm.

Customized products with various size are accepted.

Main Parameter : (Chemical / physical):

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