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of Wear Resistant Ceramics
Tel : +86-799-6790781
office@chemshun.com

Product Name:Al2O3:>99.7% Alumina Ceramics

High purity Alumina CeramicsAl2O3:>99.7%

- Alumina Wafer Polishing Plate / Turn Table 

-Large Size High Purity Alumina Baseboard for LCD Manufacturing Equipment


Material:High Purity Alumina  Al2O3:>99.7%


Application:

Semiconductor, petroleum, chemical, photovoltaic, LCD etc industriesas mechanical parts, electronic parts, microwave induction disk, insulation parts. Such as manufacturing semiconductor devices, vacuum equipment, liquid crystal manufacturing equipment and other components. For example the large size of high-purity alumina ceramic Wafer Polishing Plate / Turn Table is an important component of CMP in chemical mechanical polishing, the Alumina Baseboard for LCD.


Features:

High-purity Al2O99.7% -99.9%

High Mechanical Strength

High Wear Resistance

High Electrical Insulation

High chemical durability

Good Heat and Corrosion Resistance


Manufacturer Advantage :

We have independent intellectual property of PIBM Spontaneous Solidification system ,Professionally produce high-quality fine ceramics components.

The new technology break through the deformation and cracking problems of large-sized ceramic wet blanks in the preparation process, and the product performance is significantly optimized for the large-sized ceramic parts prepared by traditional methods.

Chemshun Ceramics' alumina ceramics sapphire lapping wafer polishing is shaped as PIBM producing process. Its an internaltional  advanced technology. PIBM sucessful solve the key problem of crack and deformation of large size alumina ceramics.PIBM technology will open another window of fine ceramics. We not only produce the high quality alumina ceramic wafer polishing plate, but also other series of large size high purity alumina ceramics such as 1200x500x20mm ceramic substrates for LCD manufacturing equipment, semiconductor delviery tracks, vacuum parts, general mechanical parts, bulletproof ceramics.


Product Shape and Size:

1.Alumina Wafer Polishing Plate / Turn Table. Disc, ring size below 850mm, thickness 45mm.

2.Alumina Baseboard for LCD as Support receptors/Carrier Plate. Shape as Long board, long bar, square board, thin board size below 1500*600mm , such as : 1200x500x20, 1400x900x30 etc.

3.Guide rails below 1000 * 45 * 45mm.

4.Empty tubes, cylinders, electric vacuum tubes, etc. With size below 300 ~ 600 × L500mm.

5.Customized products with various shape parts are accepted.


Main Parameter : (Chemical / physical)

Property

Item

Unit

Chemshun 99.7% Alumina Ceramics

General Properties

Main component

wt%

99.7-99.9

Density

gm/cc

3.94-3.97

Color

-

Ivory

Water absorption

%

0

Mechanical Properties

Flexural Strength(MOR) 20 ℃

Mpa(psix10^3)

440-550

Elastic Modulus 20℃

GPa (psix10^6)

375

Vickers Hardness

Gpa(kg/mm2) R45N

>=17

Bending Strength

Gpa

390

Tensile Strength 25℃

MPa(psix10^3)

248

Fracture Toughness (K I c)

Mpa* m^1/2

4-5

Thermal Properities

Thermal conductivity(20℃)

W/mk

30

Coefficient of Thermal expansion(25-1000℃)

1x 10^-6/℃

7.6

Thermal Shock Resistance

℃(? Tc)

200

Maximum use temperature

1700

Electrical Properities

Dielectric Strength (1MHz)

ac-kv/mm(ac v/mil)

8.7

Dielectric Constant(1 MHz)

25℃

9.7

Volume Resistivity

ohm-cm (25℃)

>10^14


ohm-cm (500℃)

2x10^12


ohm-cm (1000℃)

2x10^7


    Molding Process                                       Ceramic Finishing Process:

Molding Process.jpg             17.jpg


Quality Assurance:

Each Batch products is inspected in the factory lab and the National Inspection Center.


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Contact Chemshun

TEL:+86-799-6790781

FAX:+86-799-6790785

Mail:office@chemshun.com

ADD:Non-metal area of shangliuyuan, Economic development zone, pingxiang city, Jiangxi province, P.R.China

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